Advanced Ion and Plasma Sources for Materials Surface Engineering
Electronic Archive of Sumy State University
Переглянути архів Інформація| Поле | Співвідношення | |
| Title |
Advanced Ion and Plasma Sources for Materials Surface Engineering
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| Creator |
Petrov, A.
Alexandrov, A. Kralkina, E. Nekliudova, P. Vavilin, K. Pavlov, V. |
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| Subject |
Ion Source
Plasma Source Surface Modification Plasma Ion Beam |
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| Description |
The paper presents the results of the authors many year work in the field of ion&plasma sources development. The families of DC and RF ion and plasma sources are described. The results of ion&plasma sources utilization in materials surface modification technologies are discussed. |
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| Publisher |
Sumy State University
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| Date |
2014-05-29T09:50:36Z
2014-05-29T09:50:36Z 2012 |
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| Type |
Article
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| Identifier |
Advanced Ion and Plasma Sources for Materials Surface Engineering / A. Petrov, A. Alexandrov, E. Kralkina et al.
// Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE0
http://essuir.sumdu.edu.ua/handle/123456789/35409 |
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| Language |
en
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